Capacity planning for a twin fab

Author

Chen, James C. ; Fan, Yang-Chih ; Wang, J.Y. ; Lin, T.K. ; Leea, S.H. ; Wu, S.C. ; Lan, Y.J.

Author_Institution

Dept. of Ind. Eng., Chung Yuan Christian Univ., Chung Li, Taiwan

fYear

1999

fDate

1999

Firstpage

317

Lastpage

320

Abstract

A capacity planning system (CPS) is developed for a twin fab based on the assumption of infinite capacity. CPS consists of three major modules: WIP-pulling module, workload allocation and accumulation module, and wafer release module. To meet the master production schedule (MPS), the WIP-pulling module pulls WIP from the end of the process routine. The workload allocation and accumulation module then calculates the expected equipment loading in different time periods. If WIP cannot satisfy the MPS requirement, the wafer release module is used to determine the planned wafer start time and the start production fab. On the basis of experimental design, simulation results show that CPS can smooth equipment loading in different time periods and balance the workload between fabs

Keywords

integrated circuit manufacture; manufacturing resources planning; production control; WIP-pulling module; infinite capacity; master production schedule; process routine; semiconductor wafer fabrication; twin fab capacity planning system; wafer release module; work-in-progress; workload allocation and accumulation module; Capacity planning; Preventive maintenance; Scheduling; Testing; Tires;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on

Conference_Location

Santa Clara, CA

ISSN

1523-553X

Print_ISBN

0-7803-5403-6

Type

conf

DOI

10.1109/ISSM.1999.808799

Filename

808799