Title :
Equipment and APC integration at AMD with workstream
Author_Institution :
AMD, Sunnyvale, CA, USA
Abstract :
This paper discusses the reason for starting the equipment integration project at AMD´s Submicron Development Center, SDC, and how it led to the development of the APC framework. The architecture of the workstream, EIs and APC and how they function together are covered
Keywords :
fault location; integrated circuit manufacture; process control; production control; production engineering computing; AMD Submicron Development Center; APC framework; APC integration; automatic process control; equipment integration; fault detection; run to run control; workstream architecture; Artificial intelligence; Communication system control; Control system synthesis; Displays; Fault diagnosis; Furnaces; Graphics; Logic; Metrology; Milling machines;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-5403-6
DOI :
10.1109/ISSM.1999.808801
