High- $T_{\rm c}$ Superconducting High Gradient Magnetic Separator Using Solid Nitrogen Cooling System for Purification of CMP Wastewater

This paper presents recent progress in the fabrication and test of a 3 T/60 mm room temperature bore high- T_c superconducting high gradient magnetic separator (HGMS) using a solid nitrogen (SN2) cooling system. The aim of the study was to develop an inexpensive, compact, and stable superconducting HGMS for the purification of chemical-mechanical-planarization wastewater in the semiconductor industry. The HGMS´s magnet, which was cooled by SN2, was comprised of an assembly of 18 GdBCO double pancake coils, each of which was wound without turn-to-turn insulation. Cooling test results showed that the thermal stability of the high-T_c superconducting-HGMS magnet with SN2 was enhanced due to the large heat capacity of SN2. Moreover, in the filtration tests, the suspended solids value of filtrated wastewater at 2 T in a flow rate of 400 ml/min decreased to 1.6 mg/L, resulting in a 99.6% reduction in SS value compared to raw wastewater.