Title :
An application for treating semiconductor manufacturing industrial wastewater to environmental protection agency drinking water standards
Author :
Sandoval, Anna M.
Author_Institution :
Intel Corp., Chandler, AZ, USA
Abstract :
To meet a semiconductor manufacturing facility´s needs and ensure compliance with Arizona law, a unique water reduction and reclamation program was established between the City of Chandler and the manufacturer. Site water requirements were reduced from 5 million gallons per day to 1 million gallons per day through the use of reclaimed water, and recharge of treated wastewater into local aquifers
Keywords :
environmental factors; integrated circuit manufacture; water treatment; Arizona law; City of Chandler; aquifers; drinking water standards; environmental protection agency; industrial wastewater; reclaimed water; reclamation program; semiconductor manufacturing; site water requirements; treated wastewater; water reduction; Biomembranes; Cities and towns; Filtration; Manufacturing industries; Protection; Reverse osmosis; Semiconductor device manufacture; Wastewater treatment; Water conservation; Water resources;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-5403-6
DOI :
10.1109/ISSM.1999.808824
