مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

3368437

Title :

Author index

fYear :

1999

fDate :

11-13 Oct. 1999

Firstpage :

467

Lastpage :

469

Abstract :

The author index contains an entry for each author and coauthor included in the proceedings record.

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on

Conference_Location :

Santa Clara, CA, USA

ISSN :

1523-553X

Print_ISBN :

0-7803-5403-6

Type :

conf

DOI :

10.1109/ISSM.1999.808836

Filename :

808836

Link To Document :