DocumentCode
3368575
Title
An Integrated Force-balanced Capacitive Accelerometer For Low-G Applications
Author
Chau, K.H.-L. ; Lewis, S.R. ; Zhao, Y. ; Howe, R.T. ; Bart, S.E. ; Marcheselli, R.G.
Author_Institution
University of California, Berkeley Sensor & Actuator Center
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
593
Lastpage
596
Keywords
Accelerometers; Actuators; Automotive engineering; DH-HEMTs; Electric shock; Integrated circuit technology; Particle beams; Temperature distribution; Temperature sensors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717294
Filename
717294
Link To Document