DocumentCode
3368861
Title
Integration Of A Large Tip With High Aspect Ratio On An XY-Micro Stage For AFM Imaging
Author
Indermuhle, P.F. ; de Rooij, N.F.
Author_Institution
University of Neuchatel
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
652
Lastpage
655
Keywords
Atom optics; Atomic force microscopy; Electrostatic actuators; Frequency measurement; Optical detectors; Optical imaging; Optical sensors; Resonance; Resonant frequency; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717314
Filename
717314
Link To Document