Title :
TMI transport studies: effect of different bubbler designs
Author :
Odedra, R. ; Kingsley, A.J. ; Leese, T. ; Purdie, A. ; Coward, K.M. ; Smith, L.M. ; Rushworth, S.A. ; Williams, G. ; Kanjolia, R.K.
Author_Institution :
Epichem Ltd., Bromborough, UK
fDate :
31 May-4 June 2004
Abstract :
Transport of trimethylindium (TMI) must be highly reliable throughout source lifetimes. Bubbler design is a key factor and a number of different designs have been assessed. Significant improvements in output stability are demonstrated.
Keywords :
MOCVD; bubbles; vapour phase epitaxial growth; TMI transport; bubbler designs; trimethylindium; Containers; Epitaxial growth; Epitaxial layers; Fluid flow; Geometry; Pressure control; Solids; Stability; Temperature control; Testing;
Conference_Titel :
Indium Phosphide and Related Materials, 2004. 16th IPRM. 2004 International Conference on
Print_ISBN :
0-7803-8595-0
DOI :
10.1109/ICIPRM.2004.1442633
