DocumentCode
3369110
Title
Characterization of As-P interface-sensitive GaInP/GaAs structures grown in a production MBE system
Author
Dhellemmes, S. ; Godey, S. ; Wilk, A. ; Wallart, X. ; Mollot, F.
Author_Institution
CNRS, Villeneuve d´´Ascq, France
fYear
2004
fDate
31 May-4 June 2004
Firstpage
159
Lastpage
162
Abstract
We investigate GalnP/GaAs high electron mobility transistor structures grown in a production MBE system, with different interface commutation procedures. They have been designed to be very sensitive to the interface quality. They have been characterized by Hall measurements and photoluminescence. GaP-type and GalnAs-type interfaces can be distinguished. Best mobility results occur for few second or even no growth interruption, demonstrating the very low As memory effect of this large system.
Keywords
Hall mobility; III-V semiconductors; commutation; gallium arsenide; gallium compounds; high electron mobility transistors; indium compounds; interface structure; molecular beam epitaxial growth; photoluminescence; GaInP-GaAs; Hall measurements; MBE; high electron mobility transistor structures; interface commutation procedures; photoluminescence; Doping; Energy states; Gallium arsenide; HEMTs; MODFETs; Molecular beam epitaxial growth; Photoluminescence; Production systems; Testing; Wave functions;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 2004. 16th IPRM. 2004 International Conference on
ISSN
1092-8669
Print_ISBN
0-7803-8595-0
Type
conf
DOI
10.1109/ICIPRM.2004.1442635
Filename
1442635
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