Title :
A closed-form physical back-gate-bias dependent quasi-saturation model for SOI lateral DMOS devices with self-heating for circuit simulation
Author :
Liu, C.M. ; Shone, F.C. ; Kuo, J.B.
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
fDate :
31 May-2 Jun 1995
Abstract :
This paper reports a closed-form physical back-gate-bias dependent quasi-saturation model for silicon-direct-bonded lateral SOI DMOS devices with self-heating. By solving Poisson´s equation in the substrate direction with the thermal equation, a closed-form physical SOI DMOS quasi-saturation model considering lattice temperature suitable for circuit simulation has been derived. Based on the analytical model, the surface state above the field oxide may effectively decrease the back gate bias effect on the quasi-saturation behavior in the SOI DMOS device. With a more negative back gate bias, the thermal effect on quasi-saturation is less influential
Keywords :
circuit analysis computing; power MOSFET; semiconductor device models; silicon-on-insulator; surface states; Poisson equation; SOI lateral DMOS devices; Si; analytical model; back-gate-bias dependent model; circuit simulation; closed-form physical model; direct-bonded devices; field oxide; lattice temperature; quasi-saturation model; self-heating; surface state; thermal equation; Analytical models; Circuit simulation; Doping; Lattices; MOS devices; Poisson equations; Region 2; Temperature; Thin film devices; Voltage;
Conference_Titel :
VLSI Technology, Systems, and Applications, 1995. Proceedings of Technical Papers. 1995 International Symposium on
Conference_Location :
Taipei
Print_ISBN :
0-7803-2773-X
DOI :
10.1109/VTSA.1995.524652