Modeling and microfabrication of a CMOS resonator for magnetic field measurement

Author

Ahmad, Farooq ; Dennis, John Ojur ; Khir, Mohd Haris Md ; Hamid, Nor Hisham

Author_Institution

Dept. of Electr. & Electron. Eng., Univ. Teknol. PETRONAS, Tronoh, Malaysia

Volume

2

fYear

2012

fDate

12-14 June 2012

Firstpage

701

Lastpage

706

Abstract

This paper presents the modeling and microfabrication of a CMOS resonant magnetic field sensor capable of measuring magnetic field in the range of nanotesla. This sensor is based on differential electrostatic along with Lorentz force actuation and piezoresistive sensing. Cadence virtuoso layout is used to design the resonant magnetic sensor for fabrication. Using microfabrication facilities of MIMOS Bhd all CMOS layers i.e. three metal and two poly layers are used to fabricate the magnetic sensor to enhance the sensitivity. At sensor output, without any amplification its sensitivity is 1.4807 μV/μT at 0.001 damping ratio with quality factor 500 and resonant frequency 9.35 kHz.

Keywords

CMOS integrated circuits; Q-factor; electrostatics; magnetic field measurement; magnetic sensors; microfabrication; micromechanical resonators; microsensors; sensitivity analysis; CMOS resonant magnetic field sensor; CMOS resonator microfabrication; CMOS resonator modeling; Cadence virtuoso layout; Lorentz force actuation; MIMOS Bhd all-CMOS layers; amplification; damping ratio; differential electrostatic; frequency 9.35 kHz; magnetic field measurement; nanotesla; piezoresistive sensing; quality factor; resonant frequency; resonant magnetic sensor design; sensitivity enhancement; CMOS integrated circuits; Electrostatic actuators; Lorentz covariance; Magnetic fields; Magnetic sensors; Metals; Resonant frequency; Differential electrostatic actuators and PZR sensing; Interdigitated fingers; Lorentz force; MEMS Resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent and Advanced Systems (ICIAS), 2012 4th International Conference on

Conference_Location

Kuala Lumpur

Print_ISBN

978-1-4577-1968-4

Type

conf

DOI

10.1109/ICIAS.2012.6306104

Filename

6306104