Title :
Nonlinear forced vibration for an electromechanical coupled micro-plate simple supported at three sides and free at one side
Author :
Sun, Libo ; Xu, Lizhong
Author_Institution :
Mech. Eng. Inst., Yanshan Univ., Qinhuangdao, China
Abstract :
Dynamic characteristics of MEMS components shows nonlinear features, therefore, traditional linear analysis methods can not satisfy the design precision of microelectromechanical system, and small parameter perturbation method provides an effective solution. In this paper, Linz Ted-poincare´ method is used to solve the forced dynamic responses of electromechanical coupled micro-plate system, simple supported at three sides and free at one side plate. The dynamic responses satisfied precisions are obtained, and the forced dynamic response regularities and amplitude-frequency characteristics are summarized. The calculation results indicate that the dynamic responses based on nonlinear analysis methods have higher precision; the solution not only increases the systemic design rationality, but also improves design precision.
Keywords :
design engineering; micromechanical devices; nonlinear dynamical systems; vibrations; Linz Tedpoincare method; MEMS components; design precision; microelectromechanical system; microplate dynamics; nonlinear analysis methods; nonlinear forced vibration; Aerodynamics; Automatic control; Couplings; Differential equations; Mechanical systems; Microelectromechanical systems; Micromechanical devices; Nonlinear dynamical systems; Surface resistance; Vibrations; Linz Ted-poincare´; MEMS Micro-plate; Nonlinear dynamics; method Forced vibration;
Conference_Titel :
Mechatronics and Automation, 2009. ICMA 2009. International Conference on
Conference_Location :
Changchun
Print_ISBN :
978-1-4244-2692-8
Electronic_ISBN :
978-1-4244-2693-5
DOI :
10.1109/ICMA.2009.5246550
