From the Implementation to the Characterisation and Assembling of Microfabricated Optical Alcali Vapor Cell for MEMS Atomic Clocks

Author

Nieradko, L. ; Gorecki, C. ; Dziuban, J. ; Douahi, A. ; Giordano, V. ; Beugnot, J.-C. ; Guérandel, S. ; Moraja, M.

Author_Institution

Univ. de Franche-Comte, Besancon

fYear

2007

fDate

10-14 June 2007

Firstpage

45

Lastpage

48

Abstract

We describe the fabrication of miniature alkali atom vapor cells using silicon micromachining and anodic bonding. Such cells consist of cavities etched in silicon, with internal volumes of few mm. Original technique for introducing cesium into the cells is described: based on local heating of alkali dispenser. Cesium absorption and coherent population trapping resonances were measured in the cells.

Keywords

atomic clocks; bonding processes; elemental semiconductors; etching; micro-optomechanical devices; microcavities; micromachining; population inversion; silicon; MEMS atomic clocks; Si; alkali dispenser; anodic bonding; cesium absorption; coherent population trapping resonances; etching; microcavities; miniature optical alkali vapor cell; silicon micromachining; Assembly; Atom optics; Atomic clocks; Atomic measurements; Bonding; Etching; Micromachining; Micromechanical devices; Optical device fabrication; Silicon; MEMS/MOEMS; atomic clock; coherent population trapping; wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300067

Filename

4300067