Optimal control of arrays of microcantilevers

Author

Napoli, M. ; Bamieh, Bassam ; Dahleh, Mohammed

Author_Institution

Dept. of Mech. Eng., California Univ., Santa Barbara, CA, USA

Volume

2

fYear

1998

fDate

16-18 Dec 1998

Firstpage

2077

Abstract

We present a model for an array of microcantilevers that are used in atomic force microscopy and nano-scale manufacturing. The microcantilevers are connected to each other through a common base, and are individually actuated. The sensors are also integrated on each microcantilever. This system is an example of a spatially-invariant system with a distributed array of sensors and actuators. We exploit the spatial invariance of the problem to design optimal H₂ controllers for this array. An analytic expression for the optimal controller is derived in the transformed domain, and estimates of the coupling range of the controller is obtained

Keywords

arrays; atomic force microscopy; control system synthesis; invariance; microactuators; microsensors; multidimensional systems; nanotechnology; suboptimal control; atomic force microscopy; distributed actuator array; distributed sensor array; microcantilevers; nano-scale manufacturing; optimal H₂ controllers; spatial invariance; spatially-invariant system; Actuators; Atomic force microscopy; Face detection; Force sensors; Integrated circuit modeling; Mechanical engineering; Optimal control; Pulp manufacturing; Sensor arrays; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Decision and Control, 1998. Proceedings of the 37th IEEE Conference on

Conference_Location

Tampa, FL

ISSN

0191-2216

Print_ISBN

0-7803-4394-8

Type

conf

DOI

10.1109/CDC.1998.758640

Filename

758640