DocumentCode
3371347
Title
Advances in Thick-Film Sensors
Author
White, N.M.
Author_Institution
Univ. of Southampton, Southampton
fYear
2007
fDate
10-14 June 2007
Firstpage
107
Lastpage
111
Abstract
A review of the latest advances in thick-film sensors is presented. Examples are given of applications in the major signal domains. A brief history of the technology is presented and it is shown how thick-films can be combined with microelectromechanical systems (MEMS) to produce robust and cost-effective solutions to sensing problems. Some specific examples of mechanical transducers developed in the author´s own laboratories are presented.
Keywords
microsensors; thick film sensors; transducers; major signal domains; mechanical transducers; microelectromechanical systems; thick-film sensors; Building materials; Capacitive sensors; Chemical sensors; Firing; Glass; Mechanical sensors; Resistors; Steel; Substrates; Thick film sensors; Thick-film; hybrid devices; sensor technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300083
Filename
4300083
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