Title :
Harvesting Energy from Vibrations by a Micromachined Electret Generator
Author :
Sterken, T. ; Fiorini, Paolo ; Altena, G. ; Van Hoof, C. ; Puers, R.
Author_Institution :
lMEC, Leuven
Abstract :
The development of low power autonomous systems has triggered the research for waste energy recuperation. A micromachined generator has been designed to extract energy from vibrations in the ambient. It consists of an electrostatic transducer which is continuously polarized by an electret. The design of the generator has been optimized towards miniaturization. A prototype has been fabricated.
Keywords :
electric generators; electrostatic devices; micromechanical devices; vibrations; electrostatic transducer; harvesting energy; low power autonomous systems; micromachined electret generator; miniaturization; vibrations; waste energy recuperation; Design optimization; Electrets; Electrostatics; Frequency; Packaging; Polarization; Power generation; Resonance; Transducers; Vibrations; Power MEMS; electret; scavenger; vibration;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300088