DocumentCode
3371476
Title
Growth of InP single crystals by liquid encapsulated Czochralski (LEC) using glassy-carbon crucibles
Author
de Oliveira, C.E.M. ; Miskys, C.R. ; de Carvalho, M.M.G.
Author_Institution
Inst. de Fisica Gleb Wataghin, Univ. Estadual de Campinas, Sao Paulo, Brazil
fYear
1996
fDate
21-25 Apr 1996
Firstpage
290
Abstract
Summary form only given, as follows. The growth of InP single crystals by LEC is usually performed using quartz or pyrolitic boron nitrite (PBN) crucibles. In the case of the quartz crucible, the encapsulant (B2O3) sticks to its walls causing it to break during cooling. Moreover, quartz is a source for silicon contamination. PBN crucibles do not present these problems; however they are very expensive. Using a high pressure puller and glassy-carbon crucibles, undoped InP single crystals weighting 100 g and with 25 mm diameter were grown in the ⟨100⟩ direction. The residual carrier concentration of samples, measured by the Van der Pauw method at 300K, was about 5×1015 cm-3, a result as good as those obtained with quartz crucibles, with the advantage that glassy-carbon crucibles are fully reusable
Keywords
III-V semiconductors; carrier density; crystal growth from melt; indium compounds; semiconductor growth; C; InP; Van der Pauw method; glassy-carbon crucibles; liquid encapsulated Czochralski growth; residual carrier concentration; semiconductor; single crystals; Boron; Cooling; Doped fiber amplifiers; Indium phosphide; Liquid crystals; Pollution measurement; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1996. IPRM '96., Eighth International Conference on
Conference_Location
Schwabisch-Gmund
Print_ISBN
0-7803-3283-0
Type
conf
DOI
10.1109/ICIPRM.1996.492034
Filename
492034
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