• DocumentCode
    3371488
  • Title

    InP synthesis by the synthesis, solute diffusion (SSD) method using glassy-carbon crucibles

  • Author

    Miskys, C.R. ; de Oliveira, C.E.M. ; de Carvalho, M.M.G.

  • Author_Institution
    Inst. de Fisica Gleb Wataghin, Univ. Estadual de Campinas, Sao Paulo, Brazil
  • fYear
    1996
  • fDate
    21-25 Apr 1996
  • Firstpage
    291
  • Abstract
    An InP synthesis system for the synthesis, solute diffusion (SSD) method has been built. It provides high purity InP charges with low carrier densities to be used as starting material for single-crystal liquid encapsulated Czochralski (LEC) growth. The synthesis is usually performed in quartz crucibles but as the silica walls react with the In-P solution, the crucible breaks during the furnace cooling at the end of the process. Also, the purity of crystals grown in a silica crucible is reduced due to Si contamination, since the dominant donor impurity in SSD grown InP has been identified as Si. Glassy-carbon is a refactory material with low vapor pressure that can be moulded in various forms and sizes. Indeed the glassy-carbon crucible is reusable after the synthesis because InP does not stick to its walls. Preliminary electrical characteristics measurements showed a residual carrier concentration below 3x1015 cm-3. This result is comparable with those achieved utilizing quartz crucibles. These features make glassy-carbon an interesting alternative in comparison with quartz and PBN crucibles
  • Keywords
    III-V semiconductors; carrier density; crystal growth from melt; indium compounds; semiconductor growth; C; InP; glassy-carbon crucibles; liquid encapsulated Czochralski growth; residual carrier concentration; semiconductor; solute diffusion; Charge carrier density; Contamination; Cooling; Crystalline materials; Crystals; Electric variables; Furnaces; Impurities; Indium phosphide; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Indium Phosphide and Related Materials, 1996. IPRM '96., Eighth International Conference on
  • Conference_Location
    Schwabisch-Gmund
  • Print_ISBN
    0-7803-3283-0
  • Type

    conf

  • DOI
    10.1109/ICIPRM.1996.492035
  • Filename
    492035