Title :
A 3V Operation RF MEMS Variable Capacitor using Piezoelectric and Electrostatic Actuation with Lithographical Bending Control
Author :
Ikehashi, T. ; Ogawa, E. ; Yamazaki, H. ; Ohguro, T.
Author_Institution :
Toshiba Corp. Semicond. Co., Yokohama
Abstract :
A 3 V operation RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. Bending of the piezoelectric actuator is controlled by a lithographical pattern formed on top of the actuator. The hybrid actuation and the optimized bending enabled 2.6 V pull- in voltage with the pull-out voltage as high as 2.0 V The measured capacitance ratio is 14.
Keywords :
capacitors; electrostatic actuators; piezoelectric actuators; RF MEMS variable capacitor; electrostatic actuation; electrostatic force; hybrid actuation; lithographical bending control; microelectromechanical system; piezoelectric actuation; piezoelectric actuator bending; piezoelectric force; voltage 3 V; Capacitors; Electric variables control; Electrostatic actuators; Low voltage; Mobile handsets; Piezoelectric actuators; Piezoelectric films; Radiofrequency microelectromechanical systems; Residual stresses; Solid state circuits; Bending; PZT; Piezoelectric; RF MEMS; Variable Capacitor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300093
