Smart Individual Switch Addressing of 5 Ã\x97 5 and 20 Ã\x97 20 MEMS Double-Switch Arrays

Author

Braun, Stefan ; Oberhammer, Joachim ; Stemme, Göran

Author_Institution

KTH - R. Inst. of Technol., Stockholm

fYear

2007

fDate

10-14 June 2007

Firstpage

153

Lastpage

156

Abstract

This paper presents a smart row/column addressing scheme for large MEMS microswitch arrays, utilizing the pull-in / pull-out hysteresis of their electrostatic actuators to efficiently reduce the number of control lines. Single-chip 20 times 20 double-switch switch arrays with individually programmable 400 switch elements have been fabricated and the smart addressing scheme was successfully evaluated. The reproducibility of the actuation voltages within the array is very important for this addressing scheme and therefore the influence of effects such as isolation layer charging on the pull-in voltages has also been investigated.

Keywords

electrostatic actuators; microswitches; MEMS double-switch arrays; MEMS microswitch arrays; electrostatic actuators; isolation layer charging; programmable switch elements; pull-in/pull-out hysteresis; smart individual switch addressing; smart row/column addressing; Biomembranes; Electrodes; Electrostatic actuators; Hysteresis; Micromechanical devices; Microswitches; Sensor arrays; Solid state circuits; Switches; Voltage; MEMS switches; electrostatic actuators; individual addressing; switch arrays;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300094

Filename

4300094