Analytic study on micro electromechanical systems sensor

The pressure sensor is an important branch of micro electromechanical systems (MEMS). In this paper, the pressure sensor is explored and studied both on theory and experiment. The basic principle, the accuracy, the repeatability and the arrearage of the sensor are analyzed in details, which improve scientific basis for the sensor selection. At last, the chip structure of the sensor is explored clearly. Through the research, we find that the sensor designed in this paper has the chief advantages, such as the work reliability and high linearity.