Monolithic Phase Shifter Based on Mechanically Tunable Saw Delay Line

Author

Kuypers, J.H. ; Schmidt, M.E. ; Tanaka, S. ; Esashi, M.

Author_Institution

Tohoku Univ., Sendai

fYear

2007

fDate

10-14 June 2007

Firstpage

161

Lastpage

164

Abstract

This paper presents results of mechanically controlling the phase velocity of surface acoustic waves (SAW) and the application to monolithic phase shifters operating at 0.1~10 GHz. A phase sensitivity of 2deg/V and sensitivity of the phase velocity (Deltav/v) of 41times10^-6 /V have been measured for devices operating at 2.45 GHz. This is 2 orders of magnitude larger than existing SAW-based monolithic phase shifters. The acoustic wavelength being 10.000 times smaller than the free space equivalent together with the large sensitivity lead to a 50~500 times reduced device area compared to existing phase shifters.

Keywords

UHF phase shifters; microwave phase shifters; surface acoustic wave delay lines; tuning; frequency 0.1 GHz to 10 GHz; frequency 2.45 GHz; mechanically tunable SAW delay line; monolithic phase shifter; phase sensitivity; phase velocity control; surface acoustic waves; Acoustic measurements; Acoustic waves; Delay lines; Phase measurement; Phase shifters; Surface acoustic wave devices; Surface acoustic waves; Velocity control; Velocity measurement; Wavelength measurement; Acoustic RF MEMS; Delay line; Electrostatic tuning; Phase shifter;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300096

Filename

4300096