Title :
A pressure sensor of the industry
Author :
Ling Shi ; Chunlei Sun ; Qing´en Li
Author_Institution :
Dept. of Mech. Eng., Zhengjiang High Vocational Technol. Sch., Zhenjiang, China
Abstract :
A pressure sensor structure of the industry is adopted in this paper. The reliability and stability of the sensor are analyzed understand the high pressure situation. Detailed introduction and study are carried out for the particular sensor chip and 10MPa high work pressure is loaded on the sensor chip for performance analysis. Through the analysis, we find that the stress on the middle is negative and that of the edge is positive of the chip. The Wheatstone bridge is composed and the output of circuit can be maximal. And we study its ability of overload resistance too. Through the analysis, we find that the sensor designed here has a high ability of overload resistant, high sensitivity, good linearity and fast dynamic response and so on. And the sensor is especially applied to oil industry.
Keywords :
petroleum industry; pressure sensors; reliability; stability; Wheatstone bridge; fast dynamic response; high sensitivity; oil industry; performance analysis; pressure 10 MPa; pressure sensor stability; reliability; sensor chip; Industries; Piezoresistance; Resistors; Sensors; Silicon; Strain; Stress; dynamic performance; industry; linearity; sensor; stability;
Conference_Titel :
Electronic and Mechanical Engineering and Information Technology (EMEIT), 2011 International Conference on
Conference_Location :
Harbin, Heilongjiang
Print_ISBN :
978-1-61284-087-1
DOI :
10.1109/EMEIT.2011.6023999
