A pressure sensor of the industry

A pressure sensor structure of the industry is adopted in this paper. The reliability and stability of the sensor are analyzed understand the high pressure situation. Detailed introduction and study are carried out for the particular sensor chip and 10MPa high work pressure is loaded on the sensor chip for performance analysis. Through the analysis, we find that the stress on the middle is negative and that of the edge is positive of the chip. The Wheatstone bridge is composed and the output of circuit can be maximal. And we study its ability of overload resistance too. Through the analysis, we find that the sensor designed here has a high ability of overload resistant, high sensitivity, good linearity and fast dynamic response and so on. And the sensor is especially applied to oil industry.