Title :
Elimination of recast layer and microcracking in laser machining with femtosecond pulses
Author :
Liu, Xindong ; Chen, Xia ; Lotshaw, William T. ; Tien, A.C.
Author_Institution :
Center for Ultrafast Optical Science, The University of Michigan
Keywords :
Drilling; Gas lasers; Laser beam cutting; Laser modes; Laser theory; Machining; Optical materials; Optical pulses; Power lasers; Pulsed laser deposition;
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4125-2
DOI :
10.1109/CLEO.1997.602400
