SWNT Growth by LPCVD on Ferritin-Based Iron Catalyst Nanoparticles Towards CNT Sensors

Author

Durrer, L. ; Helbling, T. ; Zenger, C. ; Jungen, A. ; Stampfer, C. ; Hierold, C.

Author_Institution

ETH Zurich, Zurich

fYear

2007

fDate

10-14 June 2007

Firstpage

187

Lastpage

190

Abstract

We investigated the growth of individual single-walled carbon nanotubes (SWNTs) by low pressure chemical vapor deposition (LPCVD) on Ferritin-based Fe catalyst. According to Ferritin adsorption measurements, we show that the SWNT density on the surface can be controlled by the Ferritin concentration in the adsorption solution. The grown SWNTs were contacted by Cr/Au layers, structured by electron beam lithography and lift-off, resulting in carbon nanotube (CNT) based field effect transistors (FET).

Keywords

carbon nanotubes; catalysts; chemical vapour deposition; electron beam lithography; field effect transistors; nanoparticles; sensors; CNT sensor; FET; Ferritin concentration; LPCVD; SWNT growth; electron beam lithography; ferritin adsorption measurement; ferritin-based iron catalyst nanoparticle; field effect transistor; low pressure chemical vapor deposition; single-walled carbon nanotube; Carbon nanotubes; Chemical sensors; Chemical vapor deposition; Chromium; Density measurement; Electron beams; FETs; Gold; Iron; Nanoparticles; CNT based FET; Fe2O3 nanoparticles; Ferritin adsorption; LPCVD; SWNT growth;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300102

Filename

4300102