Design and Fabrication of MEMS-Based Monolithic Fuel Cells

This paper describes the design, fabrication and performance of small fuel cells using micro electromechanical systems (MEMS) technology. The MEMS-based fuel cell consisted of three components layers, including those of an electromechanically integrated anode cathode, and polymer electrolyte membrane (PEM). We focused on carbon material. Carbon nanotube (CNT) was employed as electrically conductive material suitable for both gas diffusion and catalyst support layer. A prototype was successfully demonstrated with a maximum power output of 0.075 W/cm² at current density of approximately 0.2 A/cm².