Title :
Micro/NANO-Friction and Thermal-Mechanical Properties of Polymer Thin-Film Investigated with an Integrated SPM Probe Array
Author :
Bao, Haifei ; Liu, Bin ; Li, Xinxin
Author_Institution :
Chinese Acad. of Sci., Shanghai
Abstract :
Size and temperature effects of micro/nano friction between a tiny tip and a polymer film are investigated. This topic is important in MEMS/NEMS such as high-density thermal-mechanical data storage on polymethylmethacrylate (PMMA) film. In present research, three electric-thermal probe-tips with varied apex dimensions are on-chip integrated to study the micro/nano friction and structural properties, which are remained as unsolved problems in MEMS/NEMS. Present experiments directly reveal significant size and temperature effects on micro/nano friction, adhesion and the structural transitions of PMMA thin film.
Keywords :
friction; polymer films; scanning probe microscopy; MEMS/NEMS; integrated SPM probe array; micro/nano-friction; polymer thin-film; polymethylmethacrylate film; thermal-mechanical properties; Adhesives; Energy dissipation; Friction; Micromechanical devices; Nanoelectromechanical systems; Optical films; Polymer films; Scanning probe microscopy; Temperature; Transducers; Micro/nano friction; Micromachined integrated probe; Size effect; Transition of polymer film;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300128
