Micro/NANO-Friction and Thermal-Mechanical Properties of Polymer Thin-Film Investigated with an Integrated SPM Probe Array

Author

Bao, Haifei ; Liu, Bin ; Li, Xinxin

Author_Institution

Chinese Acad. of Sci., Shanghai

fYear

2007

fDate

10-14 June 2007

Firstpage

299

Lastpage

302

Abstract

Size and temperature effects of micro/nano friction between a tiny tip and a polymer film are investigated. This topic is important in MEMS/NEMS such as high-density thermal-mechanical data storage on polymethylmethacrylate (PMMA) film. In present research, three electric-thermal probe-tips with varied apex dimensions are on-chip integrated to study the micro/nano friction and structural properties, which are remained as unsolved problems in MEMS/NEMS. Present experiments directly reveal significant size and temperature effects on micro/nano friction, adhesion and the structural transitions of PMMA thin film.

Keywords

friction; polymer films; scanning probe microscopy; MEMS/NEMS; integrated SPM probe array; micro/nano-friction; polymer thin-film; polymethylmethacrylate film; thermal-mechanical properties; Adhesives; Energy dissipation; Friction; Micromechanical devices; Nanoelectromechanical systems; Optical films; Polymer films; Scanning probe microscopy; Temperature; Transducers; Micro/nano friction; Micromachined integrated probe; Size effect; Transition of polymer film;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300128

Filename

4300128