Fabrication of micro gear with new technologies

Microfabracation is the critical technology to obtain microelectromechanical systems (MEMS) parts. Nowadays, microfabrication technologies are usually based on the mask lithography and Focused-ion-beam (FIB) sputtering, which are in fact two and a half dimensional (2.5-D) fabrication and are difficult to fabricate real 3-D parts. Based on the real 3-D fabrication technology of two-photon of femtosecond laser and the replication processes of micro electroforming, micromolding, and nanoimprinting, the fabracation of micro gears with high precision, low costs and mass production is studied. I.e. firstly, fabricate polymethyl methacrylate (PMMA) parts or molds by two-photon of femtosecond laser. Secondly, replicate metallic parts or molds with microelectroforming based on PMMA parts. At last, replicate Polycarbonate (PC) or PMMA parts using micromolding or nanoimprinting based on the matallic part or mold. The microfabrication technologies researched offer a new way of manufacturing MEMS parts.