Aqueous Transduction of Poly-Sige Disk Resonators

Author

Chandrahalim, Hengky ; Bhave, Sunil A. ; Quévy, Emmanuel P. ; Howe, Roger T.

Author_Institution

Cornell Univ., Ithaca

fYear

2007

fDate

10-14 June 2007

Firstpage

313

Lastpage

316

Abstract

This paper demonstrates an electrostatic transducer for lateral contour-mode resonators in which the transduction gaps are filled with a liquid dielectric (water) having much higher permittivity than air ( kappa_water = 80.1). Aqueous transduction is more efficient than air-gap transduction (lower motional impedance) and has a higher frequency tuning range compared than solid-dielectric transduction. We have demonstrated a 42 MHz poly-SiGe disk resonator with de-ionized (Dl) water confined to the electrode gaps. The resonator has a measured quality factor (Q) of 3,800, motional impedance (Rx) of 3.9 kOmega and 3% series frequency tuning range.

Keywords

Ge-Si alloys; Q-factor; dielectric liquids; dielectric resonators; electrostatic devices; micromechanical resonators; permittivity; transducers; MEMS; SiGe; aqueous transduction; de-ionized water; disk resonators; electrostatic transducer; frequency 42 MHz; lateral contour-mode resonators; liquid dielectric; motional impedance; permittivity; quality factor; series frequency tuning; Air gaps; Dielectric liquids; Electrodes; Electrostatics; Frequency; Impedance measurement; Permittivity; Q measurement; Transducers; Tuning; aqueous transduction; dielectric; electrostatic tuning; poly-SiGe;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300131

Filename

4300131