DocumentCode :
3372258
Title :
Effects of insulator surface roughness on Al-alloy film properties and crystallographic orientation in Al-alloy/Ti/insulator structure
Author :
Onoda, Hiroshi ; Narita, Tadashi ; Touchi, Kenshin ; Hashimoto, Keiichi
Author_Institution :
VLSI Res. & Dev. Center, Oki Electr. Ind. Co. Ltd., Tokyo, Japan
fYear :
1996
fDate :
April 30 1996-May 2 1996
Firstpage :
139
Lastpage :
147
Abstract :
The effects of insulator surface roughness on the overlying Al-alloy properties on Al-alloy/Ti layered interconnects have been investigated. The Al-alloy surface roughness and Al(111) preferred orientation depends strongly on the underlying insulator roughness, especially at elevated Al-alloy deposition temperature. The planarization of underlying insulator down to the nm level is considered to improve the overlying Al-alloy film properties, not only the surface roughness but also the crystallographic orientations. It can be concluded that Al-alloy/Ti layered interconnect prepared on the underlying insulator with a very smooth surface on which Al-alloy film has a highly preferred (111) texture, has a higher resistance against electromigration induced failure than that on a rough insulator surface.
Keywords :
ULSI; aluminium alloys; electromigration; failure analysis; integrated circuit metallisation; integrated circuit reliability; surface topography; titanium; IC interconnects; IC reliability; ULSI; crystallographic orientation; deposition temperature; electromigration induced failure; film properties; insulator surface roughness; layered interconnects; preferred orientation; Crystallography; Insulation; Optical films; Plasma temperature; Rough surfaces; Semiconductor films; Sputtering; Substrates; Surface resistance; Surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
Conference_Location :
Dallas, TX, USA
Print_ISBN :
0-7803-2753-5
Type :
conf
DOI :
10.1109/RELPHY.1996.492074
Filename :
492074
Link To Document :
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