DocumentCode :
3372272
Title :
Wip control and calibration in a wafer fab
Author :
Zhugen Zhou ; Rose, Oliver
Author_Institution :
Comput. Sci. Dept., Univ. of Fed. Armed Forces Munich, Neubiberg, Germany
fYear :
2012
fDate :
9-12 Dec. 2012
Firstpage :
1
Lastpage :
12
Abstract :
In this paper, a priority matrix table is used to assign priority to lots according to due date and workload information with the objective to keep lots going through the fab at the right pace to maintain WIP balance. Besides that, a WIP calibration method is proposed to recover WIP balance due to events such as unpredictable tool failure. The simulation results demonstrate that the proposed priority matrix table achieves a better WIP balance than FIFO (first in first out) and ODD (operation due date), and the WIP calibration method is able to correct for the WIP imbalance.
Keywords :
calibration; semiconductor device manufacture; semiconductor technology; work in progress; FIFO; ODD; WIP balance; WIP calibration method; WIP control; first in first out; operation due date; priority matrix table; unpredictable tool failure; wafer fab; Calibration; Computational modeling; Manufacturing processes; Monitoring; Schedules; Throughput;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Simulation Conference (WSC), Proceedings of the 2012 Winter
Conference_Location :
Berlin
ISSN :
0891-7736
Print_ISBN :
978-1-4673-4779-2
Electronic_ISBN :
0891-7736
Type :
conf
DOI :
10.1109/WSC.2012.6464988
Filename :
6464988
Link To Document :
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