Multi-Object Conveyance by Peripherally Controlled Micro Actuator/Sensor Array

In this paper, we demonstrate the multi-object conveyance by a micro system of actuator / sensor array, which is a stack-integrated transparent actuator array chip on a photo sensor array chip of 16 times 16 cells. The system can convey not only an object to a desired point by the feedback control but also two objects to different directions independently; nevertheless each cell of the system is not controlled independently but by only 16 times 4 pads, which are situated peripherally on 4 edges of the system.