Three-Dimensional in VIVO Real Time Imaging by a Miniature Dual-Axes Confocal Microscope Based on a Two-Dimensional MEMS Scanner

Author

Piyawattanametha, W. ; Ra, H. ; Mandella, M.J. ; Liu, J. T C ; Wong, L.K. ; Du, C.B. ; Wang, T.D. ; Contag, C.H. ; Kino, G.S. ; Solgaard, O.

Author_Institution

Stanford Univ., Stanford

fYear

2007

fDate

10-14 June 2007

Firstpage

439

Lastpage

442

Abstract

We demonstrate a novel microelectromechanical system (MEMS) based Dual-Axes confocal (DAC) microscope in a 10-mm diameter handheld package. Miniaturization is achieved by using a barbell-shaped, gimbaled, two-dimensional (2-D) MEMS scanner that is actuated by self-aligned vertical comb actuators. The maximum DC optical scan angles are plusmn4.25deg on the inner axis and plusmn1.5deg on the outer axis, and the corresponding resonance frequencies are 3.4 kHz and 1.2 kHz. The maximum imaging rate is 5 frames/second. The miniature DAC microscope operating at 785-nm-wavelength achieves full- width-half-maximum (FWHM) transverse and axial resolutions of 4.2 mum and 7 mum, respectively.

Keywords

actuators; biological organs; biomedical optical imaging; cancer; fluorescence; image resolution; image scanners; medical image processing; micro-optomechanical devices; optical microscopy; tumours; 2-D MEMS scanner; 3-D in vivo real time imaging; DC optical scan angles; axial resolution; cancer detection; fluorescence markers; frequency 1.2 kHz; frequency 3.4 kHz; full- width-half-maximum transverse resolution; human colon tissue; miniature dual-axes confocal microscope; resonance frequencies; self-aligned vertical comb actuators; size 10 mm; sub-cellular imaging capability; surgical resection; wavelength 785 nm; Actuators; In vivo; Microelectromechanical systems; Micromechanical devices; Microscopy; Optical imaging; Packaging; Resonance; Resonant frequency; Two dimensional displays; 2-D MEMS Scanner; 3-D Image; Confocal Microscope; High Resolution Image; Imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300162

Filename

4300162