Built-In Upwards-Bending Electrostatic Actuator Capable of Three-Level-Structural Variable Capacitor

Author

Konishi, Hiroshi ; Nishiyama, Madoka ; Suzuki, Junji ; Tezuka, Yasuo ; Komai, Atsushi ; Suzuki, Yoshihiko ; Suzuki, Kenichiro

Author_Institution

Nikon Corp., Kanagawa

fYear

2007

fDate

10-14 June 2007

Firstpage

447

Lastpage

450

Abstract

We have developed a new electrostatic actuator consisting of multilevel structure, which can move in a long distance with no need of a high driving voltage. This actuator features to have a built-in upward-deflection. We have also developed a variable capacitor, which can be controlled with a capacitance ratio (C/R) higher than 10 using a new configuration of the actuators and capacitor plates. The overall process to make these devices is quite easy to integrate with the CMOS circuits.

Keywords

CMOS integrated circuits; capacitors; electrostatic actuators; micromechanical devices; CMOS circuits; built-in upward-deflection; electrostatic actuator; multilevel structure; three-level-structural variable capacitor; Capacitance; Capacitors; Circuits; Electric variables control; Electrodes; Electrostatic actuators; Radio frequency; Resists; Silicon compounds; Voltage; RF MEMS; electrostatic actuator; multilevel structure; surface micromachining; variable capacitor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300164

Filename

4300164