Title :
Built-In Upwards-Bending Electrostatic Actuator Capable of Three-Level-Structural Variable Capacitor
Author :
Konishi, Hiroshi ; Nishiyama, Madoka ; Suzuki, Junji ; Tezuka, Yasuo ; Komai, Atsushi ; Suzuki, Yoshihiko ; Suzuki, Kenichiro
Author_Institution :
Nikon Corp., Kanagawa
Abstract :
We have developed a new electrostatic actuator consisting of multilevel structure, which can move in a long distance with no need of a high driving voltage. This actuator features to have a built-in upward-deflection. We have also developed a variable capacitor, which can be controlled with a capacitance ratio (C/R) higher than 10 using a new configuration of the actuators and capacitor plates. The overall process to make these devices is quite easy to integrate with the CMOS circuits.
Keywords :
CMOS integrated circuits; capacitors; electrostatic actuators; micromechanical devices; CMOS circuits; built-in upward-deflection; electrostatic actuator; multilevel structure; three-level-structural variable capacitor; Capacitance; Capacitors; Circuits; Electric variables control; Electrodes; Electrostatic actuators; Radio frequency; Resists; Silicon compounds; Voltage; RF MEMS; electrostatic actuator; multilevel structure; surface micromachining; variable capacitor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300164
