Fabrication of Reinforced Nanoporous Membranes

Author

Hoogerwerf, A.C. ; Hinderling, C. ; Krishnamoorthy, S. ; Hibert, C. ; Spassov, V. ; Overstolz, T.

Author_Institution

CSEM SA, Neuchatel

fYear

2007

fDate

10-14 June 2007

Firstpage

489

Lastpage

492

Abstract

A fabrication technology to create reinforced nanoporous membranes of 60 nm thick is described. The technology uses a variety of micromachining processes to form a reinforced membrane. Block copolymer micelle formation is used to define the pores 20 to 30 nm in diameter that are subsequently etched in the membrane using Deep Reactive Ion Etching (DRIE). The membrane is made of a silicon nitride polysilicon sandwich that allows a post-etching reduction of the pore size though the oxidation of the polysilicon.

Keywords

micromechanical devices; nanoporous materials; oxidation; polymer blends; sputter etching; block copolymer micelle formation; deep reactive ion etching; micromachining processes; polysilicon oxidation; pore size; post-etching reduction; reinforced nanoporous membrane fabrication; silicon nitride polysilicon sandwich; Biomembranes; Etching; Fabrication; Filtering; Micromachining; Micromechanical devices; Nanoporous materials; Nanotechnology; Oxidation; Silicon; MEMS; MST; Nanotechnology; block copolymers; mechanical design; membranes;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300174

Filename

4300174