Title :
Fabrication of Reinforced Nanoporous Membranes
Author :
Hoogerwerf, A.C. ; Hinderling, C. ; Krishnamoorthy, S. ; Hibert, C. ; Spassov, V. ; Overstolz, T.
Author_Institution :
CSEM SA, Neuchatel
Abstract :
A fabrication technology to create reinforced nanoporous membranes of 60 nm thick is described. The technology uses a variety of micromachining processes to form a reinforced membrane. Block copolymer micelle formation is used to define the pores 20 to 30 nm in diameter that are subsequently etched in the membrane using Deep Reactive Ion Etching (DRIE). The membrane is made of a silicon nitride polysilicon sandwich that allows a post-etching reduction of the pore size though the oxidation of the polysilicon.
Keywords :
micromechanical devices; nanoporous materials; oxidation; polymer blends; sputter etching; block copolymer micelle formation; deep reactive ion etching; micromachining processes; polysilicon oxidation; pore size; post-etching reduction; reinforced nanoporous membrane fabrication; silicon nitride polysilicon sandwich; Biomembranes; Etching; Fabrication; Filtering; Micromachining; Micromechanical devices; Nanoporous materials; Nanotechnology; Oxidation; Silicon; MEMS; MST; Nanotechnology; block copolymers; mechanical design; membranes;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300174
