Qualification and Applications of a Piezoelectric MEMS Process

Author

Poppe, E. ; Østbø, N.P. ; Booij, W. ; Tyholdt, F. ; Calame, F. ; Hök, B. ; Jensen, F. ; Raeder, H. ; Muralt, P.

Author_Institution

SINTEF, Oslo

fYear

2007

fDate

10-14 June 2007

Firstpage

529

Lastpage

532

Abstract

An industrializable process for manufacturing of piezoelectric ultrasound transducer elements is demonstrated. The PZT film is deposited by chemical solution deposition on SOI wafers, and standard MEMS processes are utilized to make cantilevers, bridges and membranes. The PZT film of -50% of the devices exposed to thermal aging were found to fail at 85degC - 85%RH (relative humidity), while a real-life test of 8-10¹⁰ cycles at resonance only gives a slight change in Q-value and resonance frequency.

Keywords

micromechanical devices; piezoelectric thin films; piezoelectric transducers; PZT film; chemical solution deposition; piezoelectric MEMS process; piezoelectric ultrasound transducer elements; thermal aging; Chemical elements; Manufacturing industries; Manufacturing processes; Micromechanical devices; Piezoelectric films; Piezoelectric transducers; Qualifications; Resonance; Ultrasonic imaging; Ultrasonic transducers; MEMS; PZT; chemical solution deposition; reliability; transducer;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300184

Filename

4300184