Title :
Qualification and Applications of a Piezoelectric MEMS Process
Author :
Poppe, E. ; Østbø, N.P. ; Booij, W. ; Tyholdt, F. ; Calame, F. ; Hök, B. ; Jensen, F. ; Raeder, H. ; Muralt, P.
Author_Institution :
SINTEF, Oslo
Abstract :
An industrializable process for manufacturing of piezoelectric ultrasound transducer elements is demonstrated. The PZT film is deposited by chemical solution deposition on SOI wafers, and standard MEMS processes are utilized to make cantilevers, bridges and membranes. The PZT film of -50% of the devices exposed to thermal aging were found to fail at 85degC - 85%RH (relative humidity), while a real-life test of 8-1010 cycles at resonance only gives a slight change in Q-value and resonance frequency.
Keywords :
micromechanical devices; piezoelectric thin films; piezoelectric transducers; PZT film; chemical solution deposition; piezoelectric MEMS process; piezoelectric ultrasound transducer elements; thermal aging; Chemical elements; Manufacturing industries; Manufacturing processes; Micromechanical devices; Piezoelectric films; Piezoelectric transducers; Qualifications; Resonance; Ultrasonic imaging; Ultrasonic transducers; MEMS; PZT; chemical solution deposition; reliability; transducer;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300184
