Degradation mechanisms of vertical cavity surface emitting lasers

Author

Cheng, Y. Michael ; Herrick, Robert W. ; Petrof, Pierre M. ; Hibbs-Brenner, Mary K. ; Morgan, Robert A.

Author_Institution

Dept. of Mater. Eng., California Univ., Santa Barbara, CA, USA

fYear

1996

fDate

April 30 1996-May 2 1996

Firstpage

211

Lastpage

213

Abstract

We present the results of our failure analysis of proton-implanted vertical cavity surface emitting lasers (VCSELs). We show that VCSELs have a unique failure mode with the degradation occurring not only in the active regions, but also strikingly in the p-DBR mirror layers. The defect structures associated with degradation are analyzed by cathodoluminescence, electroluminescence and are identified by transmission electron microscopy. The processes involved in the p-DBR degradation are discussed.

Keywords

cathodoluminescence; distributed Bragg reflector lasers; electroluminescence; failure analysis; ion implantation; laser mirrors; laser reliability; semiconductor lasers; surface emitting lasers; transmission electron microscopy; active regions; cathodoluminescence; degradation mechanisms; electroluminescence; failure analysis; failure mode; p-DBR mirror layers; proton-implanted lasers; transmission electron microscopy; vertical cavity surface emitting lasers; Data communication; Degradation; Fiber lasers; Laser modes; Mirrors; Scanning electron microscopy; Semiconductor lasers; Surface emitting lasers; Transmission electron microscopy; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International

Conference_Location

Dallas, TX, USA

Print_ISBN

0-7803-2753-5

Type

conf

DOI

10.1109/RELPHY.1996.492121

Filename

492121