• DocumentCode
    3373244
  • Title

    Photosensitive Poly(Dimethylsiloxane) (Photopdms) for Rapid and Simple Polymer Fabrication

  • Author

    Bhagat, Ali Asgar S ; Jothimuthu, Preetha ; Papautsky, Ian

  • Author_Institution
    Univ. of Cincinnati, Cincinnati
  • fYear
    2007
  • fDate
    10-14 June 2007
  • Firstpage
    537
  • Lastpage
    540
  • Abstract
    In this paper, we report a new and simple method of patterning polydimethylsiloxane (PDMS) directly under normal ambient light for rapid prototyping of disposable microfluidic lab-on-a-chips (LOCs). The photodefinable PDMS (photoPDMS) is positive-acting and only sensitive to light below 365 nm, which permits processing outside a gold room. A parametric study was conducted to optimize this novel fabrication technique. Features as small as 100 mum were successfully fabricated using photoPDMS. To further demonstrate the potential of this novel technique, thin (< 30 mum) free-standing patterned PDMS films. Successful demonstration of this novel process presents a feasibly simpler alternative approach for rapid prototyping of disposable microfluidic biochips for lab-on-a-chip applications.
  • Keywords
    bioMEMS; lab-on-a-chip; microfluidics; microsensors; optical polymers; polymer films; rapid prototyping (industrial); LOC; PDMS patterning; disposable microfluidic lab-on-a-chips; microfluidic biochips; photodefinable PDMS; photosensitive poly(dimethylsiloxane); polymer fabrication; rapid prototyping; Costs; Curing; Fabrication; Glass; Gold; Lab-on-a-chip; Microfluidics; Polymers; Prototypes; Wafer scale integration; PDMS; benzophenone; photo-definable; photoPDMS;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
  • Conference_Location
    Lyon
  • Print_ISBN
    1-4244-0842-3
  • Electronic_ISBN
    1-4244-0842-3
  • Type

    conf

  • DOI
    10.1109/SENSOR.2007.4300186
  • Filename
    4300186