Title :
Highly Flexible SU-8 Microstructures
Author :
Spratley, J.P.F. ; Ward, M.C.L. ; Hall, P.S.
Author_Institution :
Univ. of Birmingham, Birmingham
Abstract :
This paper outlines the testing of SU-8 structures subjected to high deformations in bending. Six ´dog-bone´ test structures were fabricated with flexible sections comprising of variations of 25 mum thick beams, and tested using a novel method to bend the structures through very small radii. A simple mathematical model is outlined that accurately predicts this performance. The structures underwent stresses of up to 191MPa, some showing signs of plastic yield at very high deformations.
Keywords :
bending; flexible structures; micromechanical devices; MEMS; SU-8 microstructures; bending; deformations; flexible sections; plastic yield; thick beams; Materials testing; Mathematical model; Mechanical factors; Micromechanical devices; Microstructure; Plastics; Protocols; Scanning electron microscopy; Silicon; Stress; Device Characterisation; Material Properties; SU-8;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300198
