DocumentCode
3373544
Title
Novel MCM Interconnection Analysis Using Capacitive Charge Generation (CCG)
Author
Cole, Edward I., Jr. ; Peterson, Kenneth A. ; Barton, Daniel L.
fYear
1996
fDate
April 30 1996-May 2 1996
Firstpage
332
Keywords
Conductors; Dielectrics and electrical insulation; Electron beams; Failure analysis; Integrated circuit interconnections; Physics; Scanning electron microscopy; Signal generators; Surface charging; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
Conference_Location
Dallas, TX, USA
Print_ISBN
0-7803-2753-5
Type
conf
DOI
10.1109/RELPHY.1996.492139
Filename
492139
Link To Document