Title :
Theoretical Model of A Three Plates Capacitive Pressure Sensor
Author :
Ge, Pei ; Tan, Woei Wan ; Tay, Francis
Author_Institution :
Dept. of Electr. & Comput. Eng., Singapore Nat. Univ.
Abstract :
ABAQUS and its post-data processing program requires a very long time for simulation, data file manipulation and capacitance computing. The analytical method proposed in this paper is a quick way to estimate characteristics of a three plate pressure sensor. It combines computation of diaphragm deflections and capacitance, and thus provides a promising way to use a optimization method in sensor´s design. Compared with result of ABAQUS, this method has a good accuracy (within 5% error) in predicting sensor´s output. This method works well when the mesh size is sufficiently small. Therefore, the analytical method can be used to predict the sensor´s performance when the device parameters are varied
Keywords :
capacitive sensors; deformation; plates (structures); pressure sensors; ABAQUS; diaphragm deflections; optimization method; sensor design optimisation; three plate capacitive pressure sensor; Analytical models; Capacitance; Capacitive sensors; Deformable models; Drives; Finite element methods; Mathematical model; Mechanical engineering; Mechanical sensors; Tactile sensors; Diaphragm deformation; FEM; Pressure sensor; Simulation;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 2005. IMTC 2005. Proceedings of the IEEE
Conference_Location :
Ottawa, Ont.
Print_ISBN :
0-7803-8879-8
DOI :
10.1109/IMTC.2005.1604102
