Theoretical Model of A Three Plates Capacitive Pressure Sensor

Author

Ge, Pei ; Tan, Woei Wan ; Tay, Francis

Author_Institution

Dept. of Electr. & Comput. Eng., Singapore Nat. Univ.

Volume

1

fYear

2005

fDate

16-19 May 2005

Firstpage

214

Lastpage

219

Abstract

ABAQUS and its post-data processing program requires a very long time for simulation, data file manipulation and capacitance computing. The analytical method proposed in this paper is a quick way to estimate characteristics of a three plate pressure sensor. It combines computation of diaphragm deflections and capacitance, and thus provides a promising way to use a optimization method in sensor´s design. Compared with result of ABAQUS, this method has a good accuracy (within 5% error) in predicting sensor´s output. This method works well when the mesh size is sufficiently small. Therefore, the analytical method can be used to predict the sensor´s performance when the device parameters are varied

Keywords

capacitive sensors; deformation; plates (structures); pressure sensors; ABAQUS; diaphragm deflections; optimization method; sensor design optimisation; three plate capacitive pressure sensor; Analytical models; Capacitance; Capacitive sensors; Deformable models; Drives; Finite element methods; Mathematical model; Mechanical engineering; Mechanical sensors; Tactile sensors; Diaphragm deformation; FEM; Pressure sensor; Simulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 2005. IMTC 2005. Proceedings of the IEEE

Conference_Location

Ottawa, Ont.

Print_ISBN

0-7803-8879-8

Type

conf

DOI

10.1109/IMTC.2005.1604102

Filename

1604102