DocumentCode :
3373567
Title :
Failure Analysis of Sub-Micrometer Devices and Structures Using Scanning Thermal Microscopy
Author :
Majumdar, A. ; Luo, K. ; Lai, J. ; Shi, Z.
fYear :
1996
fDate :
April 30 1996-May 2 1996
Firstpage :
342
Keywords :
Atomic beams; Atomic force microscopy; Electrostatic discharge; Failure analysis; Image resolution; Liquid crystals; Power dissipation; Spatial resolution; Temperature; Thermal engineering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
Conference_Location :
Dallas, TX, USA
Print_ISBN :
0-7803-2753-5
Type :
conf
DOI :
10.1109/RELPHY.1996.492140
Filename :
492140
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3373567
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