DocumentCode
3373577
Title
Soft-Landing and Bounce-Back Actuation for Active Stiction Control
Author
Wang, Yuyan ; Talghader, Joseph J.
Author_Institution
Univ. of Minnesota, Minneapolis
fYear
2007
fDate
10-14 June 2007
Firstpage
611
Lastpage
614
Abstract
An electrostatic actuation scheme for creating a soft contact is described and applied to cantilevers and doubly clamped beams. The actuation voltage form is composed of a high voltage pulse with a low DC voltage. The voltage pulse height and duration is mapped for achieving minimum impact force, and the results are well predicted by the simulation. Furthermore, a new phenomenon is observed for clamped beams that pulse longer than the soft-landing requirement bounces the beam back rather than stick.
Keywords
beams (structures); cantilevers; electrostatic actuators; stiction; active stiction control; cantilevers; doubly clamped beams; electrostatic actuation; microbeams; soft-landing bounce-back actuation; Electrostatic actuators; Laser beams; Low voltage; Microelectromechanical devices; Micromechanical devices; Optical control; Optical surface waves; Pulse measurements; Structural beams; Thermal conductivity; electrostatic actuation; microbeams; stiction;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300204
Filename
4300204
Link To Document