DocumentCode
3373583
Title
New Laser Beam Neating Methods Applicable to Fault Localization and Defect Detection in VLSI Devices
Author
Nikawa, Kiyoshi ; Inoue, Shoji
fYear
1996
fDate
April 30 1996-May 2 1996
Firstpage
346
Keywords
Brightness; Cathode ray tubes; Control systems; Fault detection; Laser beams; Lighting control; Surface emitting lasers; System testing; Transmission electron microscopy; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
Conference_Location
Dallas, TX, USA
Print_ISBN
0-7803-2753-5
Type
conf
DOI
10.1109/RELPHY.1996.492141
Filename
492141
Link To Document