Title :
A High-Sensitivity Photon Emission Microscope System with Continuous Wavelength Spectroscopic Capabi
Author :
Tao, J.M. ; Chim, W.K. ; Chan, D.S.H. ; Phang, J.C.H. ; Liu, Y.Y.
fDate :
April 30 1996-May 2 1996
Keywords :
Failure analysis; Optical coupling; Optical filters; Optical imaging; Optical microscopy; Optical sensors; Photonic integrated circuits; Spectral analysis; Spectroscopy; Stimulated emission;
Conference_Titel :
Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
Conference_Location :
Dallas, TX, USA
Print_ISBN :
0-7803-2753-5
DOI :
10.1109/RELPHY.1996.492143