DocumentCode
3373665
Title
Nanoscopic EBIC technique in a hybrid SEM/SFM system
Author
Heiderhoff, R. ; Cramer, R.M. ; Balk, L.J.
fYear
1996
fDate
April 30 1996-May 2 1996
Firstpage
366
Keywords
Current measurement; Electric variables measurement; Electron beams; Force measurement; Leakage current; Scanning electron microscopy; Schottky barriers; Schottky diodes; Semiconductor process modeling; Spatial resolution;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
Conference_Location
Dallas, TX, USA
Print_ISBN
0-7803-2753-5
Type
conf
DOI
10.1109/RELPHY.1996.492144
Filename
492144
Link To Document