Non Linear Compact Modeling of RE-MEMS Switches by Means of Model Order Reduction

In this work, a new method is presented for the extraction of low order electromechanical models for dynamic nonlinear simulation of radio frequency (RF) microelectromechanical (MEMS) switches, using model order reduction (MOR). The method is based on a separate modeling of the electrical and the mechanical part of the problem, which are coupled at circuit level. The derived reduced order model includes effects of initial stress in the device materials and enables a substantial speed-up of large signal dynamical analysis. The accuracy of the model has been demonstrated by comparing the simulated and measured dynamic response of a fabricated device.