Title :
Characterization of CMOS Compatible RF MEMS Switch at Cryogenic Temperatures
Author :
Rantakari, P. ; Vähä-Heikkilä, T.
Author_Institution :
VTT Tech. Res. Centre of Finland, Espoo
Abstract :
In this paper, a CMOS compatible micromechanical RF switch is reported and its mechanical performance is studied on a wide temperature range from 295 K down to 20 K. A switch with a clamped- clamped structure showed plastic deformation during the cooling and finally failed during the warming cycle. On the contrary, a switch with a cantilever structure was functional throughout the test cycles.
Keywords :
CMOS integrated circuits; cryogenics; integrated circuit testing; microswitches; plastic deformation; radiofrequency integrated circuits; CMOS compatible RF MEMS switch; cantilever structure; clamped- clamped structure; cryogenic temperatures; plastic deformation; temperature 295 K to 20 K; Bridge circuits; Capacitance; Cooling; Cryogenics; Radio frequency; Radiofrequency microelectromechanical systems; Scattering parameters; Switches; Temperature; Voltage; Cryogenics; RF MEMS; RF Switch;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300211
