Quality Factor and Resonance Frequency Shift Due to Air in RF MEMS Radial Disk Resonators

Author

Veijola, Timo

Author_Institution

Helsinki Univ. of Technol., Helsinki

fYear

2007

fDate

10-14 June 2007

Firstpage

643

Lastpage

646

Abstract

Damping due to air in RF MEMS disk resonators is studied with simulations. The fluid flow in the air gaps and around the oscillating structure is studied with FEM simulations using a harmonic solver for the linearized Navier-Stokes equations with slip boundary conditions. The dominating damping mechanisms are identified and modelled with compact models. Based on the simulations, quality factor and resonance frequency shift vs. air pressure are calculated. The results are compared with published measurement results of disk resonators operating at frequencies 131 MHz and 274 MHz.

Keywords

Navier-Stokes equations; Q-factor; finite element analysis; micromechanical resonators; FEM simulation; RF MEMS radial disk resonator; damping mechanism; finite element method; linearized Navier-Stokes equation; quality factor; resonance frequency shift; Air gaps; Boundary conditions; Damping; Fluid flow; Navier-Stokes equations; Q factor; Radiofrequency identification; Radiofrequency microelectromechanical systems; Resonance; Resonant frequency; Disk Resonator; Gas damping; Quality factor; RF MEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300212

Filename

4300212