Title :
Quality Factor and Resonance Frequency Shift Due to Air in RF MEMS Radial Disk Resonators
Author_Institution :
Helsinki Univ. of Technol., Helsinki
Abstract :
Damping due to air in RF MEMS disk resonators is studied with simulations. The fluid flow in the air gaps and around the oscillating structure is studied with FEM simulations using a harmonic solver for the linearized Navier-Stokes equations with slip boundary conditions. The dominating damping mechanisms are identified and modelled with compact models. Based on the simulations, quality factor and resonance frequency shift vs. air pressure are calculated. The results are compared with published measurement results of disk resonators operating at frequencies 131 MHz and 274 MHz.
Keywords :
Navier-Stokes equations; Q-factor; finite element analysis; micromechanical resonators; FEM simulation; RF MEMS radial disk resonator; damping mechanism; finite element method; linearized Navier-Stokes equation; quality factor; resonance frequency shift; Air gaps; Boundary conditions; Damping; Fluid flow; Navier-Stokes equations; Q factor; Radiofrequency identification; Radiofrequency microelectromechanical systems; Resonance; Resonant frequency; Disk Resonator; Gas damping; Quality factor; RF MEMS;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300212
