Title :
Circular Plate Electrostatic Zipping Actuator for the Application of a Tunable Electromagnetic Cavity Resonator
Author :
Yang, X. ; Lang, J.H. ; Slocum, A.H.
Author_Institution :
Analog Devices Inc., Cambridge
Abstract :
This paper presents a proof-of-concept design of a MEMS tunable capacitor for an electromagnetic cavity resonator, by using a circular plate electrostatic zipping actuator. The design, fabrication and mechanical testing of a device containing the actuator and the capacitor will be presented. The testing results are compared with a finite element model using coupled-field analysis with ANSYS.
Keywords :
capacitors; cavity resonators; electromagnetic actuators; electrostatic actuators; finite element analysis; MEMS tunable capacitor; circular plate electrostatic zipping actuator; coupled-field analysis; device design; device fabrication; device mechanical testing; finite element model; tunable electromagnetic cavity resonator; Capacitors; Cavity resonators; Electrodes; Electromagnetic coupling; Electrostatic actuators; Fabrication; Frequency; Micromechanical devices; Silicon; Testing; coupled-field analysis with ANSYS; electromagnetic cavity resonator; electrostatic zipping actuator; tunable capacitor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300215
